diff --git a/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/ConstructorInvoker.cs b/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/ConstructorInvoker.cs
index f49ba0fa90983f..13eadbffb4580e 100644
--- a/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/ConstructorInvoker.cs
+++ b/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/ConstructorInvoker.cs
@@ -2,6 +2,7 @@
 // The .NET Foundation licenses this file to you under the MIT license.
 
 using Internal.Reflection.Core.Execution;
+using System.Diagnostics;
 using System.Reflection.Runtime.MethodInfos;
 using static System.Reflection.DynamicInvokeInfo;
 
@@ -28,33 +29,46 @@ public static ConstructorInvoker Create(ConstructorInfo constructor)
             return new ConstructorInvoker(runtimeConstructor);
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke()
         {
-            return _methodBaseInvoker.CreateInstanceWithFewArgs(new Span<object?>());
+            object result = _methodBaseInvoker.CreateInstanceWithFewArgs(new Span<object?>());
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke(object? arg1)
         {
-            return _methodBaseInvoker.CreateInstanceWithFewArgs(new Span<object?>(ref arg1));
+            object result = _methodBaseInvoker.CreateInstanceWithFewArgs(new Span<object?>(ref arg1));
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke(object? arg1, object? arg2)
         {
             StackAllocatedArguments argStorage = default;
             argStorage._args.Set(0, arg1);
             argStorage._args.Set(1, arg2);
-            return _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(2));
+            object result = _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(2));
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke(object? arg1, object? arg2, object? arg3)
         {
             StackAllocatedArguments argStorage = default;
             argStorage._args.Set(0, arg1);
             argStorage._args.Set(1, arg2);
             argStorage._args.Set(2, arg3);
-            return _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(3));
+            object result = _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(3));
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke(object? arg1, object? arg2, object? arg3, object? arg4)
         {
             StackAllocatedArguments argStorage = default;
@@ -62,13 +76,17 @@ public object Invoke(object? arg1, object? arg2, object? arg3, object? arg4)
             argStorage._args.Set(1, arg2);
             argStorage._args.Set(2, arg3);
             argStorage._args.Set(3, arg4);
-            return _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(4));
+            object result = _methodBaseInvoker.CreateInstanceWithFewArgs(argStorage._args.AsSpan(4));
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object Invoke(Span<object?> arguments)
         {
-
-            return _methodBaseInvoker.CreateInstance(arguments);
+            object result = _methodBaseInvoker.CreateInstance(arguments);
+            DebugAnnotations.PreviousCallContainsDebuggerStepInCode();
+            return result;
         }
     }
 }
diff --git a/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/MethodInvoker.cs b/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/MethodInvoker.cs
index 93efbe1f0470f4..82951425e37093 100644
--- a/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/MethodInvoker.cs
+++ b/src/coreclr/nativeaot/System.Private.CoreLib/src/System/Reflection/MethodInvoker.cs
@@ -41,6 +41,7 @@ public static MethodInvoker Create(MethodBase method)
             throw new ArgumentException(SR.Argument_MustBeRuntimeMethod, nameof(method));
         }
 
+        [DebuggerGuidedStepThrough]
         public object? Invoke(object? obj)
         {
             object? result = _methodBaseInvoker.InvokeDirectWithFewArgs(obj, new Span<object?>());
@@ -48,6 +49,7 @@ public static MethodInvoker Create(MethodBase method)
             return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object? Invoke(object? obj, object? arg1)
         {
             object? result = _methodBaseInvoker.InvokeDirectWithFewArgs(obj, new Span<object?>(ref arg1));
@@ -55,6 +57,7 @@ public static MethodInvoker Create(MethodBase method)
             return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object? Invoke(object? obj, object? arg1, object? arg2)
         {
             StackAllocatedArguments argStorage = default;
@@ -66,6 +69,7 @@ public static MethodInvoker Create(MethodBase method)
             return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object? Invoke(object? obj, object? arg1, object? arg2, object? arg3)
         {
             StackAllocatedArguments argStorage = default;
@@ -78,6 +82,7 @@ public static MethodInvoker Create(MethodBase method)
             return result;
         }
 
+        [DebuggerGuidedStepThrough]
         public object? Invoke(object? obj, object? arg1, object? arg2, object? arg3, object? arg4)
         {
             StackAllocatedArguments argStorage = default;